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SRC/SEMATECH Engineering Research Center for Environmentally Benign Semiconductor Manufacturing |
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Download Microelectronics Manufacturing and the Environment Course Materials These materials require a password to download and are available for the use of Center members and affiliates only. They are copyrighted and we ask that you not share them with others without our permission. The MME course materials focus on basic semiconductor manufacturing processes and their associated environmental impacts. The class materials consist of PowerPoint lecture slides, reading materials, exercises and references. They are targeted at upper level undergraduate and graduate students. The subject matter covers:
For more information, contact: Download Menu (links) MANUFACTURING DESIGN FOR ENVIRONMENT Toxicology and Semiconductor Manufacturing Lecture slides using arsenic as a model toxin to illustrate how toxicology and environmental health issues can be incorporated into semiconductor manufacturing process design. 22 PowerPoint slides by Dr.Can Ozbal, Julia Chan, Dr. Peter Dedon, and Dr. Lionel Kimmerling, MIT Toxicology and Semiconductor Manufacturing Homework A homework assignment sheet to accompany the Toxicology lecture presentation above. 1 page, MSWord by Dr.Can Ozbal, Julia Chan, Dr. Peter Dedon, and Dr. Lionel Kimerling, MIT Barriers to Best Practices A Design for Environment (DFE) case study student handout designed to stimulate classroom discussion. 10 pages MSWord by Dr.Can Ozbal, Julia Chan, Dr. Peter Dedon, and Dr. Lionel Kimerling, MIT Barriers to Best Practices -Teaching Guide A teaching guide for the case study above. 3 pages, MSWord by Dr.Can Ozbal, Julia Chan, Dr. Peter Dedon, and Dr. Lionel Kimerling, MIT Barriers to Best Practices – Questions A set of eight discussion questions for the case study above. 1 page, MSWord by Dr.Can Ozbal, Julia Chan, Dr. Peter Dedon, and Dr. Lionel Kimerling, MIT Rationale for Design For Environment, Health & Safety (DFESH) An introduction to DFEHS discussing the business driving forces, with brief case studies and the consequences of not using DFEHS. 5 pages MSWord by Bob Duffin, Motorola/SEMATECH Design for Environment, Health & Safety (DFESH) A set of lecture slides that are a companion to the text above. The slides discuss DFEHS, business driving forces, case studies and the consequences of not using DFEHS. 15 PowerPoint slides by Bob Duffin, Motorola/SEMATECH CHEMICAL MECHANICAL POLISHING (CMP) CMP Tutorial A lecture slide presentation on Chemical Mechanical Polishing including a process overview, equipment trends, process issues, consumables (pads and slurries), and productivity and quality issues. 83 PowerPoint slides by Dr. Ara Philipossian, Intel/U of A CMP Overview A slide lecture presentation on the basics of the CMP process. 35 PowerPoint slides by Dr. Steve Beaudoin, ASU, Dr. Duane Boning, MIT and Dr. Srini Raghavan, U of A. Environmental Impact of CMP A slide lecture on process optimization and environmental issues in CMP. 20 PowerPoint slides by Dr. Steve Beaudoin, ASU. CMP Waste Treatment A set of lecture slides on CMP waste slurry, treatment strategies including electrocoagulation/electrodecantation, and cross flow filtration. 45 PowerPoint slides by B.M. Belongia, Y. Sun, Dr. J.C. Baygents, and Dr. S. Raghavan, The University of Arizona, and Joe O’Sullivan, Pall Corp. CMP Water Recycle Lecture slides on recycling water from CMP operations including strategies and options, water quality and description of recycling systems used in industry 15 PowerPoint slides by Dr. Russ Parker, HP Labs ULTRAPURE WATER REDUCTION DI Water Reduction in Rinsing A lecture slide presentation discussing wafer rinsing, indicators of cleanliness, methods for rinse water reduction including pulsed rinsing, temperature and agitation, tank size and shape. 33 PowerPoint slides by Dr. Thomas W. Peterson, University of Arizona, Andy Hebda, University of Arizona, Thomas Roche, Motorola, and Eric Hansen, Santa Clara Plastics ULTRAPURE WATER RECYCLING Ultrapure Water Production Processes A text description of the processes used to generate ultrapure water including reverse osmosis, ion exchange, vacuum degasification, ultrafiltration and ultra violet oxidizers/sterlizers. 6 pages MSWord by John DeGenova, U of A. Ultrapure Water Recycle A text on fab water reduction, treatment and reuse including strategies, benefits and risks. Options for treatment and reuse are listed. 15 pages MSWord by John DeGenova, U of A Water- A Key Process Fluid A slide lecture on fab water usage, drivers for conservation, rinse and recycle interdependence, issues and technology gaps, trends, importance of multi-component reactions, organics and adsorption, 37 PowerPoint slides by Dr. Fahrang Shadman, U of A. PLASMA PROCESSING Plasma Processing Overview Lecture slides with an overview of basic plasma chemistry and its uses in semiconductor manufacturing. A standard chemical engineering analysis mass balance is applied to a plasma etching reactor. Includes references. 23 PowerPoint slides by Dr. Karen Gleason, MIT Global Warming Lecture slides on the greenhouse effect and global warming gases, particularly perfluorocomponds (PFCs). Quantitative methods are given for determining the global warming impact of different plasma processes. 19 PowerPoint slides by Dr. Karen Gleason, MIT PFC Reduction Technologies Lecture slides on reducing PFC emissions from plasma processing. The usage of PFCs has attracted global attention, because some of these compounds can last for more than 10,000 years in the atmosphere. 21 PowerPoint slides by Dr. Karen Gleason, MIT PFC Replacements Lecture slides on the methodology for evaluating other gases as PFC replacements for plasma processing. Incorporates research results on dielectric etching and deposition obtained under support of the NSF/SRC ERC for Environmentally Benign Semiconductor Manufacture. 26 PowerPoint slides by Dr. Karen Gleason, MIT PFC Reduction Technologies A lecture presentation on SEMATECH’s global warming reduction program including PFC destruction techniques, recovery and recycle, process optimization and alternative chemistries. 35 PowerPoint slides by Phyllis Pei and Walter Worth, SEMATECH Global Warming Status and Statistics A lecture presentation on global warming gasses, global warning potential, global warming calculations, and destruction technologies 13 PowerPoint slides by Phyllis Pei and Walter Worth, SEMATECH SURFACE PREPARATION Surface Preparation & Wet Processing A slide lecture overview of wet processing (etching & cleaning) and the various etching and cleaning chemistries used in a semiconductor manufacturing. 47 PowerPoint slides by Dr. Thomas Roche, Motorola Surface Cleaning & Wet Procesing Terminology Text describing and defining cleaning and wet processing equipment used in the industrry. 5 pages MSWord by Dr. Thomas Roche, Motorola Wet Etching & Cleaning – Surface Considerations & Process Issues A slide lecture presentation on etching & cleaning solutions and processes, particle adhesion theory, surface charge and chemistry, and contamination mechanisms. 26 PowerPoint slides by Dr. Srini Raghavan, U of A VOC EMISSIONS REFERENCES Reference List A companion reference list by module (2 pages MSWord)
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