THRUST C:  Factory Integration

The Engineering Research Center's vision of future IC fabrication facilities includes manufacturing science, technology, and new processes that would lower the use of water and energy significantly below the current levels.  In particular, our goal was to provide the technology that would make it possible to achieve the National Technology Roadmap numerical goals on water and energy for 0.13 micron technology in 2003 and sub-0.1 micron technology after 2006.  This has been and will be accomplished by new breakthroughs in water purification, use reduction, recycle, and reuse. 

Researchers at the University of Arizona, The University of California-Berkeley, MIT, and the University of Maryland (list below) are currently working on the following research areas:

[UPDATE IN PROGRESS]