Organic Contamination of Hydrogen-Terminated Silicon

4/8/98

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Table of Contents

Organic Contamination of Hydrogen-Terminated Silicon

H-terminated Si and Organics

Effects of HC Contamination

Origins of HC contamination

PPT Slide

Superoxide mediation?

PPT Slide

Aqueous Organic Contamination

Method

10 mM acetone in O2-sat’d H2O

Exposure to O2-saturated H2O

Exposure to Ar-sparged H2O

Exposure to un-sparged H2O

Dirty gas tube?

Clean gas tube, no O2

Clean gas tube, with O2

Conclusions/Future Work

Author: Greg Merklin 

Email: merklin@stanford.edu