Effects of HC Contamination

• Defects in Gate Oxides

  • Kasi, et al., (1991), Kasi and Liehr (1992)

• Defects in Epi layers

• Defects in CVD formation of SiN

  • Saga and Hattori

• But can HC be burned off?

  • Saga and Hattori (1997)

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