PPT Slide
Engineering Research Center for Environmentally Benign Semiconductor Manufacturing
H2SO4 Solution Characteristics
Solution conductivities may vary by more than 6
Max s ? 1.1 x 10-2 S/cm (40% H2SO4 at 115� C)
Min s ? 5.5 x 10-8 S/cm (UPW at room temp)
Darling, H.E., J. of Chem. and Eng. Data, July 1964
Sulfuric acid is �stickier� than
most process acids. Desorption
rate must be accounted for.
Lee, K.T. and Raghavan, S., unpublished