PPT Slide
NSF/SRC
Engineering Research Center for Environmentally Benign Semiconductor Manufacturing
Experimental Setup - Electrical
V
V
Constant Current
Source
(Power Supply)
Voltmeter (Data Card)
Device
PC with DAQ
Power Supply
Flow Cell
(Device)
PR
Precision
Resistor
Device voltage reveals trench resistance
Precision resistor voltage monitors current
PC records 6 voltages
(5 trenches + precision resistor)
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