PPT Slide

native oxide

Si

SiO

2

Si

1:4 H

2

O

2

(30%)

:H

2

SO

4

(conc.)

100�C, 4 min.

Si

H

H

H

H

H

H

H

H

H

H

H

F :H2O

1:50, H

2 min.

5 x 10-4 M I2 in methanol

20 min.

Si

? ? ? ? ? ? ? ? ? ? ?

Passivation Method

Si

H

H

H

H

H

H

H

H

H

H

H

F :H2O

1:100, H

2 min.

as received

H-terminated

oxidized

H-terminated

passivated

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