PPT Slide
Aggressive Halogens Monomethoxy-Termination of Si(111)
Gas phase chlorination of H-Si(111)
Dry, deoxygenated methanol(l) to
chlorine-terminated surface
native oxide
SiO
2
1:4, H
2
O
2
(30%):
H
(conc.)
100°C, 10 min.
H
H
H
H
H
H
H
H
H
H
H
NH
4
F(40%)
15min.
Cl
2
(
g
)
h
?
+
30 sec.
O
C
H
3
O
C
H
3
O
C
H
3
Cl
Cl
O
C
H
3
O
C
H
3
O
C
H
3
O
C
H
3
Cl
Cl
Cl
Cl
Cl
Cl
Cl
Cl
Cl
Cl
Cl
Si
Si
Si
Si
Si
Previous slide
Next slide
Back to first slide
View graphic version