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VISION

In 1996, The University of Arizona (lead institution), Massachusetts Institute of Technology, Stanford University, and the University of California-Berkeley jointly established the NSF/SRC Engineering Research Center (ERC) for Environmentally Benign Semiconductor Manufacturing to create the science, technology, and educational methods to lead the semiconductor industry to a new era of environmentally benign manufacturing.  In 1998, Cornell University, Arizona State University and MIT Lincoln Laboratory joined the Center to add additional capabilities for a new research thrust.  In 1999 the University of Maryland became a partner. 

In 2006, the Center was renamed the SRC/SEMATECH Engineering Research Center for Environmentally Benign Semiconductor Manufacturing.  The goals and objectives remain as they did in the inception of the Center.

GOALS AND OBJECTIVES Develop novel strategic solutions to existing environmental, safety and health (ESH) problems in semiconductor manufacturing. Create new and effective environmentally benign manufacturing processes. Demonstrate the positive impact of design for environment on all aspects of semiconductor manufacturing Develop innovative education programs in which environmental factors are integral parts of the curriculum.

Our specific objectives for achieving these goals were to:

• Develop a methodology for incorporating Environment, Safety & Health (ESH) factors as design parameters in the development of new processes, tools, and protocols for semiconductor manufacturing.  The emphasis is on an "integrated approach," where interactions among processes are considered, and on "process optimization" for waste minimization. rather than relying on abatement and "end-of-the-pipe" treatments.
• Demonstrate this methodology by applying it to selected manufacturing process groups that are of significant ESH concern.
• Integrate the Center activities with academic programs to provide unique learning opportunities for undergraduate and graduate students
• Extend the education mission to include continuing education and short courses for those in industry who wish to update their training in this area, and outreach to high school teachers to improve science and math instruction and make teachers aware of employment opportunities in the environmental and semiconductor industries.
• Provide a technical forum for experts from industry, research institutions, and government agencies to exchange ideas and information on ESH concerns in semiconductor manufacturing.  These exchanges will be on a proactive, preventive, non-regulatory, and pre-competitive basis.