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The one-hour ERC TeleSeminars are presented
every other Thursday with information and presentation posted below (PDF).
Presentations are also posted at our new partner site, SemiNeedle (www.semineedle.com/ERCseminars), where in addition to accessing the presentation
you can ask questions and add
comments on the presentation and connect with presenters and other attendees.
CURRENT & UPCOMING
TELESEMINAR PRESENTATIONS -- 2009:
Presentation Time:
11:00AM PDT / 11:00AM PDT (Arizona) / 12:00 MDT /
1:00PM CDT / 2:00PM EDT |
| July 9 |
Host: Srini Raghavan, Materials Science & Engineering, University of Arizona
Presentation by: Jeff Butterbaugh, Chief Technologist,
FSI International
Topic title: "Steam-Injected SPM Process for All-Wet
Stripping of Implanted Photoresist"
Abstract: Photoresist stripping in IC
manufacturing has become an increasingly challenging process as the number
of photoresist levels has increased simultaneously with a decrease in
acceptable levels of material loss and surface damage. Heavily implanted
photoresist is especially challenging due to the tough layer of
dehydrogenated, amorphous carbon that forms on the surface. Implanted
photoresist can be removed by exposing the surface layer to the aggressive
chemical/physical action of a dry plasma ashing. This kind of physical
process, however, can lead to surface damage and increased material loss.
An alternative approach is to increase the reactivity of the sulfuric acid
–“ hydrogen peroxide mixture (SPM), so that it can penetrate and dissolve
the amorphous carbon layer and achieve complete photoresist removal. In a
novel approach, steam is absorbed by SPM at the wafer surface significantly
increasing the chemical temperature while avoiding excessive dilution.
Presentation: To be posted
SemiNeedle enhanced access website: (www.semineedle.com/ERCseminars)
ERC website:
(PDF)
_________________________________________
Dial-in # (caller paid & International):
1-719-955-1670
Please use this number if your company can cover the long
distance charge; this choice will help the ERC budget and keep our cost
down.
Dial-in # (toll free):
1-800-375-2612
Use this toll free number if needed; the ERC will gladly pay for
the long distance charge.
Participant pass code:
675623 (followed by # sign)
__________________________________________
~
Please mute your phone during the speaker's presentation to
eliminate unnecessary noise over the phone lines; disengage mute for Q&A.
If you do NOT have a mute button on your phone,
use *6 to engage mute during the presentation, then *6 (again) to disengage.
~ Disengage call waiting (check
local phone directory for instructions).
~ Do not put the conference call on hold;
"hold audio" will be disruptive to other call participants.
~ For best sound quality when using speaker
phones, face the microphone when speaking; mute the phone/microphones
when not speaking.
~ If possible, avoid using cellular or cordless phones which
may cause unnecessary feedback or noise during the conference |
| July 23 |
Host: Duane
Boning,
Electrical
Engineering and Computer Science, Massachusetts Institute of Technology
Presentation by: Sarah Jane White, Civil and
Environmental Engineering, Massachusetts Institute of Technology |
The SRC/SEMATECH Engineering Research Center for Environmentally Benign
Semiconductor Manufacturing (ERC) biweekly TeleSeminar Series is hosted by Center
member universities: University of Arizona; Massachusetts Institute of
Technology; Stanford University; University of California-Berkeley; Arizona
State University; Cornell
University; Tufts University; Columbia University; University of Massachusetts; University of Washington;
University of North Carolina/Chapel Hill; University of Wisconsin; and
University of Texas/Dallas.
The ERC TeleSeminars are presented
biweekly and are available to participating ERC
institutions, industries, and all interested parties and invited guests.
The TeleSeminars, presented by ERC PIs, ERC graduate students, and invited
academic and industrial guest speakers, focus on specific research efforts within current
Center research
relevant
to the Center's mission.
The dial-in telephone number and participant code is posted with each TeleSeminar
(above) as well as in all e-announcements. If you would like to be added to
our distribution list, please contact the Center. If you should experience problems with any
portion of the dial-in process the day of presentation, please call 520-626-5259
or 520-621-6051 (University of Arizona)
for assistance.
Archived presentation materials are available to Center industrial and
university members only and require a password to access. Contact Karen McClure for more
information.
DAYLIGHT SAVING TIME:
(Begins: March 8, 2009; Ends: November 1, 2009 )
11:00AM PDT / 11:00AM PDT (Arizona) / 12:00 MDT /
1:00PM CDT / 2:00PM EDT
STANDARD TIME: (Ends: March 7, 2009)
11:00AM PST / 12:00PM MST (Arizona)
/ 1:00PM CST / 2:00PM EST
______________________
For more information on the TeleSeminar Series, contact:
Karen McClure
ERC Program Coordinator Sr.
University of Arizona
Email: kmcclure@erc.arizona.edu
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