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2015 - |
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Jan. 8, 2015 |
Host: Farhang
Shadman, Chemical and Environmental Engineering, University of Arizona
Presented by: Jivaan Kishore Jhothiraman, Chemical and
Environmental Engineering, University of Arizona
Topic title:
"Application
of PCP in drying down UHP gas distribution systems and tools"
Abstract:
Presence
of trace contaminants in process fluids is highly detrimental to the
manufacture of high performance semiconductor devices. Gas distribution
systems transporting ultra-high purity gas from bulk storage to the point of
use are susceptible to contaminants owing to the interactions with the EPSS
surface. This necessitates frequent purging of the distribution lines to
meet the stringent restrictions placed at the point of use in current
fabrication processes. Process throughput and economy of high volume
manufacturing processes is severely affected by the high amount of UHP gas
and process downtime involved with such purging operations. Current work
focusses on application of PCP on purging of gas distribution networks and
process tools.
A combinatorial approach involving experimental investigation
and process simulation is used to analyze the effect of operational and
geometrical parameters affecting contaminant propagation. The process
simulator predictions are validated using data from an experimental test bed
using moisture as the model contaminant. The application of cyclic purge on
dead volumes in gas distribution systems and process tools with varying
number and sizes of dead volumes and is studied. The advantages of pressure
cyclic purge over conventional purge is presented in terms of savings in
purge time and purge gas usage in order to realize a certain purity
baseline, along with system parameters for which this advantage can be
realized. Key cycling parameters such as frequency, ratio of pressurization
to depressurization times, pressure ranges and PCP sequences are identified
for effective contaminant removal. (PDF) |
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Feb. 5 |
Cancelled |
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Mar. 5 |
Host:
Jane Chang,
Professor and Associate Dean, Chemical and Biomolecular Engineering,
University of California-Los Angeles
Presented by: Jane Chang, University of California-Los Angeles
Topic title: “Alternative etchants for magnetic materials”
Abstract:
In this work, a thermodynamic approach is used to
assess the feasibility of various etch chemistries for cobalt-based magnetic
metal materials. Utilization of volatility diagrams assisted in the
identification of major etch products and their corresponding vapor
pressures. Special attention is paid to surface modification of elemental
and alloyed magnetic metals via halogens with sequential hydrogen exposure
to improve the overall etching efficacy. The understanding of these
reaction kinetics can further supports the development of atomic layer etch
of these magnetic metal materials. (PDF) |
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April 2 |
No
TeleSeminar: ERC Review Meeting |
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May 7 |
Host:
Paul Pantano, Associate Professor of Chemistry, University of Texas - Dallas
Guest presentation by:
Walt
Trybula, IEEE and SPIE Fellow, Ingram School of Engineering, Texas State
University – San Marcos
Topic title:
"Nanotechnology Safety
Education"
Abstract:
This presentation will
cover the steps that led to the development of and the details in two NSF
sponsored nanotechnology safety education courses. The content of the
courses is critical; however, traditional thinking would not fill the need
for educating future nanotech workers. The concern for an impact on people
and the environment is of primary safety concern.
The two most significant challenges in nanotechnology safety development are
that a) typical testing of toxicity can take seven or more years and
b) there are over 10200 possible materials to be
considered. It becomes almost impossible to understand the impact of novel
materials prior to their development and testing. Added to these facts is
that a typical start-up survives for 18 months or less. Starting with this
understanding, the courses were developed to educate people on how to
address situations with unknowns. From the beginning, it was recognized
that both ethics and risk needed to be a significant component of the
program. The courses have been thoroughly review and well received.
(PDF)
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Along with Walt Trybula1, Ph.D., the rest of the course
development investigators, Jitendra Tate2, Ph.D., Dominick
Fazarro3, Ph.D., and Craig Hanks4, Ph.D., will be on
the call looking for comments and suggestions to improve their efforts.
1Trybula
Foundation, Inc., and Ingram School of Engineering, Texas State University;
2Ingram School of Engineering, Texas State University (PI);
3Department of Technology, University of Texas at Tyler; 4Department
of Philosophy, Texas State University.
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June 4
First of the 'new' SRC WebEx presentations |
You are invited to
participate in a GRC Technology Transfer e-Workshop, hosted by
Professor Anthony Muscat, who will be speaking on research
related to task 425.049 in the Environmental, Safety and Health
thrust.
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Host:
Professor Anthony Muscat, Chemical and Environmental Engineering, University
of Arizona
Presented by: Jimmy Hackett, Chemical and Environmental
Engineering, University of Arizona
Title:
“Investigation of Speciation in III-V Wet Etching to Mitigate Hazardous
Product Formation”
Abstract: As III-V materials become more widely
considered for use as semiconductors, the need to understand their
processing increases. The objective of this study is to investigate the
species formed during a typical wet-etching of III-V materials. InAs samples
were etched in 0.1 M HCl and 0.01 M H2O2. The liquid phase was analyzed
using ICP-MS to measure the total concentration of indium and arsenic as a
function of time. The results showed a 1:1 ratio of indium and arsenic in
the liquid phase. Additionally, the concentration data was used to calculate
an etching rate of 0.78 ± 0.06 nm/s. A separate etching experiment using
profilometry obtained an etching rate of 0.89 ± 0.3 nm/s. Statistical
agreement between the etching rates from ICP-MS and profilometry shows that
a mass balance was closed around the sample. Furthermore, the concentration
data obtained for these experiments indicate that under these conditions all
species formed remained in the liquid phase. (PDF)
All contributors:
**
Anthony Muscat,
Professor and Department Head, Chemical and Environmental Engineering,
University of Arizona
** Srini Raghavan,
Professor, Materials Science and Engineering, University of Arizona
** Tim Corley, Director, Analytical Facilities-Research Support,
Hydrology and Water Resources, University of Arizona
** Jimmy Hackett, Bing Wu, and Pablo Mancheno, Graduate Students,
Chemical and Environmental Engineering, University of Arizona
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July 9 |
No TeleSeminar |
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Aug.
6 |
Host: Shyam Aravamudhan, The Joint School of Nanoscience
and Nanoengineering (JSNN), North Carolina A&T State University
Presented by: Joseph Starobin, Department of Nanoscience,
Joint School of Nanoscience and Nanoengineering, North Carolina A&T State
University and The University of North Carolina at Greensboro.
Topic title: "Analysis of cardiac repolarization as a
tool for the noninvasive assessment of cardiovascular system upon exposure
to nanomaterials"
Abstract:
The goal of this project is to investigate the feasibility for measurements
of cardiac repolarization as a tool for the noninvasive assessment of
cardiovascular system upon exposure to nanomaterials.
Cardiac repolarization
is a process of recovery of the heart after a previous excitation. It is a
major physiological process which determines stability of cardiac rhythm.
Recently, we introduced the reserve of refractoriness (RoR), as a novel
measure of stability of cardiac excitation. In this project, we utilize this
novel RoR measure as a high throughput, non-invasive and relatively easy
tool to monitor over time (both acute and chronic, along with repeated or
systematic exposure) the toxicological effects of nanomaterials on cardiac
function in vivo. In this talk, we will discuss results of cardiac
measure from pulmonary exposure to CNTs and ceria nanoparticles with and
without dobutamine" stress" test. (PDF) |
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Sept. 3 |
Host: Reyes
Sierra, Chemical and Environmental Engineering, University of Arizona and
Paul Westerhoff, Arizona State University
Presentation by: Reyes Sierra, The University of Arizona
and Xiangyu Bi, Arizona State University
Topic title: "Aquatic Fate and Toxicity of III/V Semiconductor
Materials in the Presence of Chemical-mechanical Planarization
Nanoparticles"
Abstract: Introduction of
III-V materials (e.g. gallium arsenide (GaAs), gallium indium arsenide, (GaInAs))
in semiconductor and electronics manufacturing is expected to lead to the
generation of large volumes of wastewaters combining metal oxide
nanoparticles (SiO2, Al2O3 and CeO2)
utilized in chemo-mechanical polishing (CMP) slurries and III-V metals
(arsenic, gallium and indium). The potential that these engineered
nanoparticles (NPs) may act as carriers of toxic III-V species is a concern.
This project aims to quantify the adsorption of III-V materials by CMP NPs
and explore how these interactions may impact the environmental fate,
biological uptake and aquatic toxicity of III-V species and NPs. This
presentation will
discuss results of studies conducted to assess the ecotoxicity of III-V
species as well as experimental data that confirm
the occurrence of III/V
ion
sorption onto
CMP NPs. Potential
implications of the
interactions between III/V ions
and CMP NPs
for the fate and toxicity of these materials will be
addressed. (PDF) |
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Oct. 1 |
No TeleSeminar: Review
Webinar |
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Nov. 5 |
Host: Host:
Manish Keswani, Materials Science and Engineering, University of Arizona
Presentation by: Mingrui Zhao, Chemical and Environmental
Engineering, University of Arizona
Topic title:
“Wet Processing
Applications in Integrated Circuit Fabrication”
Abstract:
Megasonic cleaning has been widely used for
removal of particulate contaminants from various surfaces in semiconductor
processing. In order to achieve effective cleaning without feature damage,
it is critical to identify experimental conditions that yield optimized
levels of stable and transient cavitation. In the first part of the
presentation, some of the fundamental work on characterization of acoustic
cavitation using different direct and indirect techniques will be reviewed.
Effect of sound field and solution parameters on cavitation behavior will be
discussed.In the second part of
the presentation, a recently developed contactless technique on bottom-up
electrodeposition of metals (Cu or Ni) for TSV applications will be
described. The electrochemical system consists of two chamber cell
containing deposition and etching solutions with a silicon wafer sealed in
between. Feasibility studies demonstrating the effect of applied current
density and deposition and etching solution composition and temperature on
deposited metal quality/deposition rate will be discussed. The presentation
will highlight the role of backside silicon oxidation and subsequent oxide
etching on kinetics of metal deposition. (PDF) |
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Dec. 3 |
Host: TBA |
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Jan. 7, 2016 |
Host: TBA |
TeleSem dial-in information
to be replaced by the SRC's Webinar request, as of June 2015 >>>
for my records >>>>>>> |
"The current presentation
is linked below (ERC website:) as well as posted at our partner site, SemiNeedle
(www.infoneedle.com/ERCseminars),
where in addition to accessing the presentation you can ask questions and add
comments on the presentation and connect with presenters and other attendees."
_______________________
Presentation:
SemiNeedle
enhanced access website:
http://www.infoneedle.com/ERCseminars
ERC
website: (PDF) to be posted
_____________________________
Dial-in # (caller paid &
International):
1-719-955-1670
Please use this number if your company can cover the long
distance charge; this choice will help the ERC budget and keep our cost
down.
Dial-in # (toll free):
1-800-375-2612
Use this toll free number if needed; the ERC will gladly pay for
the long distance charge.
Participant pass code:
675623 (followed by # sign)
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~
Please mute your phone during the speaker's presentation to
eliminate unnecessary noise over the phone lines; disengage mute for Q&A.
If you do NOT have a mute button on your phone,
use *6 to engage mute during the presentation, then *6 (again) to disengage.
~ Do not put the conference call on hold;
"hold audio" will be disruptive to other call participants.
~ To disengage call waiting (check
local phone directory for instructions).
~ For best sound quality when using speaker
phones, face the microphone when speaking; mute the phone/microphones
when not speaking.
~ If possible, avoid using cellular or cordless phones which
may cause unnecessary feedback or noise during the conference. |
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