SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing (ERC)

                                                          **  Bringing Sustainability to Semiconductor Manufacturing **

A multi-university research center leading the way to environmentally friendly semiconductor manufacturing, sponsored by the Semiconductor Research Corporation's Global Research Collaboration (GRC) Research Program
 




 

 

Home  : Seminar Series : Schedule
Schedule:

Adobe Acrobat Reader Go to 2000  1999  1998

- 2001 -
Jan. 4, 2001 NO TeleSeminar--HAPPY NEW YEAR!
Jan. 11 Host:  Chris Ober, Cornell University
Presentation/Guest:  Victor Quan Pham, Cornell University
Topic: "Recent Advances In Photoresist Processing Using Supercritical CO2" (PDF); Chris Ober "Resist Platforms for 157 nm Lithography" (PDF)
Jan. 18 CANCELLED
Jan. 25 Closed Planning Session-Thrust B 
Feb. 1 NO TeleSeminar--Preparation for Annual Review
Feb. 8 NO TeleSeminar--ERC Annual Review in Tucson
Feb. 15 CANCELLED
Feb. 22 Host: Kim Ogden, University of Arizona
Presentation Guests: Erich Gibbs, President,  High-Q Inc.; Marilyn Gould, Associate Director, Associates of Cape Cod Inc.;
and Morven McAlister, Post Doctoral Researcher, U. of A.
Topic: "
Evaluation of Current Methods for Detecting Bacteria in Ultrapure Water Systems: A New Look at an Old Challenge"
McAlister (PDF); Gibbs (PDF) (References-PDF); Gould (PDF)
March 1 Host:  Farhang Shadman, University of Arizona
Presentation Guest: Elena Krikanova, IBM Microelectronics; Lilliam Mena-Acevedo and Robert Morris, University of Arizona
Topics: "UPW Production and Quality Analysis at IBM DI Water Facility, Burlington, Vermont" (Krikanova) (PDF)
"Novel Processes for Water Purification and Wastewater Treatment: Catalytic Method for Water Purification" (Mena-Acevedo & Morris) (PDF)
March 8 Host: Stephen Beaudoin, Arizona State University
Presentation by:  Steve Beaudoin
Topic: "Particle Adhesion and Removal in Semiconductor Processing" (PDF)
March 15 Host: Cancelled
Presentation:  
Topic:
March 22 Host:  Krishna Saraswat, Stanford University
Presentation by: Professor B. (Pierre) T. Khuri-Yakub, Stanford University 
Topic: "Zero Waste Dispensing of Chemicals in Lithography and Backend Processing" (PDF)
March 29 CANCELLED 
Host: Paul McIntyre, Stanford University
Presentation by: Dr. Keith Milkove, IBM's T.J. Watson Research Center
April 5 Host:  Rafael Reif, Massachusetts Institute of Technology
Presentation by:  Victor Vartanian, Motorola
Topic: "Fate of Fluorine Determination in Exhaust from NF3-Based CVD Chamber Cleans" (PDF)
April 12 Host:  Gary Rubloff, University of Maryland
Presentation by:  Michael Lesiecki, Director, MATEC
Topic:  "Competency Based Modules for Semiconductor Manufacturing Education and Training" (PDF)
April 19 Host:  David Graves, University of California-Berkeley
Presentation by: Frank Greer, UC-Berkeley
Topic: "Radical-Enhanced Atomic Layer Chemical Vapor Deposition (REALCVD): A summary of work at UC-Berkeley" (PDF)
April 26 Host:  Greg Raupp, Arizona State University
Presentations by: Greg Raupp, Associate Dean for Research, College of Engineering and Applied Sciences, ASU - "Microelectronics Packaging: Processing Overview, Industry Trends and ESH Needs" (PDF); Nik Chawla, ASU - "Environmentally Benign Pb-free Solders for Microelectronics Packaging Applications" (To be posted at a later date)
May 3 Host: Jim Baygents, University of Arizona
Presentation by:  Jaime Ludke, University of Arizona
Topic: "CMP Waste Treatment with a Forced-Flow Electrophoresis Device" (PDF)
May 10 Host:  Anthony Muscat, University of Arizona
Presentation Guest: Jane Chang, UCLA
Topic: "Ultra-Thin Zirconium Oxide Films Deposited as
Alternative Gate Dielectric" (PDF)
May 17 Host:  Chris Ober, Cornell University
Presentation Guest:  Wayne Moreau, IBM East Fishkill, NY
Topic: "Applications of Supercritical Fluid Processes in Semiconductor Lithography" (PDF)
May 24 Host:  Steve Beaudoin, Arizona State University
Presentation by: Professor Stephen Beaudoin
Topic:
"Processing of Model Polymer Dielectrics" (PDF)
May 31 Host:   Duane Boning, MIT
Presentation/Guest: David White, MIT Microsystems Technology Laboratories
Topic:
"Characterization of Spatial Endpoint Uniformity of CMP for Reduced Consumables and Improved Yield" (PDF)
June 7 Host:  Anthony Muscat, University of Arizona
Presentation Guest: Eray S. Aydil, Department of Engineering, University of California-Santa Barbara
Topic:  "A Diagnostic Method for Monitoring Plasma Reactor Walls: Multiple Total Internal Reflection Fourier Transform Infrared Surface Probe" (PDF)
June 14 Host:  Bob Arnold, University of Arizona
Presentation by: Professor David Mathine, Optical Sciences Center, University of Arizona
Topic:  "A Proposed Toxic Chemical Sensor" (HTML)
June 21 Host:  Krishna Saraswat, Stanford University
Presentation Guest: Dr. Shahram Abdollahi Alibeik, Stanford University
Topic:  "Plasma Etch/Deposition for MEMS" (PDF)
June 28 Host:  Kim Ogden, University of Arizona
Presentation by:Arturo Ruiz-Yeomans, University of Arizona
Topic: "Biotreatment of Organic Compounds in Semiconductor Wastewater" (PDF)
July 5 NO TeleSeminar-4TH OF JULY HOLIDAY
July 12 Host:  David Graves, University of California-Berkeley
Presentation Guest: Rusty Jewett, President - Litmas Inc.
Topic: "PFC Abatement:  Moving from R&D to Production" (PDF)
July 19 Host:  Srini Raghavan, University of Arizona
Presentation Guest:  Dr. Mel Carter, Senior Research Scientist, EKC Technology, Inc.
Topic:  "Low Concentration Fluoride Chemistries for Cleaning Sub-0.25 Micron IC Devices" (PDF)
July 26 No TeleSeminar - Internal Preparation for Retreat
Aug. 2 Host:  Greg Raupp, Arizona State University
Presentation by:  Greg Raupp, Arizona State University
and Kimberly  Ogden, University of Arizona
Topic:  "Designing and On-Line Certificate Program in Microelectronics Manufacturing and Update on Center Education Projects" (PDF)
Aug. 9 No TeleSeminar - ERC Retreat at Stanford University
Aug. 16 No TeleSeminar
Aug. 23 Hosts:  Ara Philipossian and Farhang Shadman
Presentation byAra Philipossian, University of Arizona and Mike Schmotzer, University of Arizona 
Topics: "Application of Residence Time Distribution Modeling to the CMP Processes" (Philipossian) (PDF); "Application of Simulation in UPW Preparation and Distribution" (Schmotzer) (PDF)
Aug. 30 Host:  Srini Raghavan, University of Arizona
Presentation by:  Wayne Huang, doctoral student in Materials
Science and Engineering, University of Arizona
Topic: "Hydroxylamine Based Chemistries for Copper CMP" (PDF)
Sept. 6 Host:  Anthony Muscat, University of Arizona
Presentation by:  Gerardo Montano and Adam Thorsness, University of Arizona
Topic: " A Surface Chemistry Approach to the Development of Gas Phase Wafer Cleaning Processes" (PDF)
Sept. 13 Host: Farhang Shadman, University of Arizona
Presentation by:  Bert Vermeire, University of Arizona
Topic: "The Effect of Incidental Hafnium and Zirconium Contamination on MOS Processes" (PDF)
Sept. 20 Host:  Anthony Muscat, University of Arizona
Presentation by:  Casey Finstad, University of Arizona
Topic:  "Gas Phase Surface Preparation Using Ultraviolet-Activated Chlorine" (PDF)
Sept. 27 Host:  Duane Boning, MIT
Presentation Guest:  Lyle Kirman, Kinetico Incorporated
Topic: "Copper CMP Treatment Options and Challenges" (PDF)
Oct. 4 Host: Gary Rubloff, University of Maryland
Presentation by:  Gary W. Rubloff and Soon Cho, University of Maryland
Topic:  Integrated ESH Assessment: Cu CVD Unit Process (PDF)
Oct. 11 Host: Christopher Ober, Cornell University
Presentation Guests:  David Mount, Vice President of Strategic Development, SC Fluids, Inc.  AND Laura Rothman, Vice President, SC Fluids Inc.
Topic:  Supercritical CO2 Cleaning: An Overview (PDF)
Oct. 18 Host: Farhang Shadman, University of Arizona
Presentation by:  John DeGenova, Texas Instruments/ University of Arizona
Topic:  Oxidation of Organic Photoresist via Ozone/UPW:  Direct or Indirect Fundamental Mechanisms (PDF)
Oct. 25 Host:  Steve Beaudoin, Arizona State University
Presentation Guest:  James Beckman, Associate Professor, Dept. of Chemical and Materials Engineering, Arizona State University
Topic:  "Water Purification by the DEWVAPORATION Technique" (PDF)
Nov. 1 Host: Karen Gleason, MIT
Presentation by: April Ross, MIT
Topic: "Hot Filament Chemical Vapor Deposition of
Organosilicon Composite Thin Films for Porous Dielectric
Materials" (PDF)
Nov. 8 Host: Ara Philipossian, University of Arizona
Presentation by/Guest:  Jamshid Sorooshian, U of A
Topic:  "CMP Pad Conditioning, Tribology, Fluid Dynamics, and Pressure Studies" (PDF 1) (PDF 2) (PDF 3) (PDF 4)
Nov. 15 Host:  Anthony Muscat, University of Arizona
Presentation Guest:  Mary Majors, Senior ESH Specialist, Air Products Electronic Chemicals, CA
Topic:  "New Chemical EH&S Challenges:  A Supplier's Perspective" (PDF)
Nov. 22 No TeleSeminar - THANKSGIVING HOLIDAY
Nov. 29 Host:  Rafael Reif, MIT
Presentation Guest:  Dr. Brian Goolsby, Motorola
Topic:  "CVD Emissions--Analysis and Treatment" (PDF)
Dec. 6 Host:  Paul McIntyre, Stanford University
Presentation by/Guest:  Hyoungsub Kim and Yuniarto Widjaja, Stanford University
Topic: Hyoungsub Kim: "ALD of ZrO2 and HfO2 Gate Dielectrics from Metal Chloride Precursors - Processing Aspects and Dielectric Behavior"
Yuniarto Widjaja: "Quantum Chemistry Study of ZrO2 ALD" (PDF1) (PDF2)
Dec. 13 Host:  Anthony Muscat, University of Arizona
Presentation Guest:  Mike Mocella, DuPont Electronic Gases
Topic: "Fluorocarbon Gases for Advanced Dielectric Etch Applications: A Chemical Manufacturer's Perspective." (PDF)
Dec. 20 Host: Farhang Shadman, University of Arizona
Presentation Guest:  Jack Martinez, NIST
Topic:  "Semiconductor Related Programs at NIST" (PDF)
Dec. 27 NO TELESEMINAR - CHRISTMAS HOLIDAY

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