|
-
2000 -
|
| Jan. 6 | Thrust
B:
Processing, Microstructure, and Properties of ZrO2 Gate Dielectrics on Si
Michael Perkins (PDF)
and Shriram Ramanthan (PDF), Stanford University
|
| Jan. 13 |
Thrust
C: Preliminary Thoughts on System Level Decision
Support Tools for ESH in Semiconductor Manufacturing
Berit Ahmad and Paul Barton, MIT (PDF)
|
| Jan. 20 |
Thrust D: Closed Session
Open to Thrust D PIs and Students only-Review preparation |
| Jan. 27 |
Thrust A: Closed Session
Open to Thrust A PIs and Students only-Review preparation |
| Feb. 3 |
No TeleSeminar -
Preparation for Annual Site Review Meeting |
| Feb. 10 |
No TeleSeminar –
4th Annual ERC Site Review Meeting
(Feb. 8-10 in Tucson) |
| Feb. 17 |
Thrust B: No TeleSeminar
|
| Feb. 24 |
Education Thrust: Distance
Learning
Marsha Ham, U. of Arizona Extended University (PDF)
Greg Raupp, Arizona State University (PDF)
|
| March 2 |
Thrust D: CVD low k Solutions for sub-0.18um Technology
Hichem M'saad, Applied Materials Inc. (PDF) |
| March 9 |
Thrust A: Fundamental Beam Studies of Radical Enhanced Atomic Layer CVD
(REALCVD)
Frank
Greer, University of California-Berkeley (PDF)
|
| March 16 |
Thrust B: Study of the
Initial Oxidation of H-Si Using XPS and STM
Kathleen Morse, Stanford University (PDF)
|
| March 23 |
Thrust C: CMP Water Use Roundtable
Moderator: Ron Chiarello, Stanford University
Presenters: Jerry Chen, International SEMATECH --
"CMP Water Use Optimization: Int'l SEMATECH Project
Perspective" (PDF)
Michael Tritapoe, AMD --
"Improving Water Utilization for CMP Processes and Equipment" (PDF)
Jeff Joiner, Texas Instruments --
"DMOS 4 200mm Converstion Water Optimization Strategy" (PDF) |
| March 30 |
Thrust D: "Etching of Parylene-N Polymer
Dielectrics"
Stephen Beaudoin, Arizona State University (PDF) |
| April 6 |
Thrust A: "Copper CMP Effluent Flow in a Semiconductor
Facility"
Benoit Maag, Massachusetts Institute of Technology (PDF) |
| April 13 |
Thrust B: "The Effect of Absorbed Moisture on the Etching of
Doped Oxide Films"
Adam Thorsness, University of Arizona (PDF) |
| April 20 |
Thrust C: "Recycle Process Development and
Simulation: Adsorption/Desorption Module Development" -- Mike
Schmotzer, University of Arizona (PDF)
"Novel Process for Water Purification and Wastewater Treatment:
Catalytic Method for Water Purification" -- Robert Morris and Lilliam
Mena-Acevedo, University of Arizona (PDF) |
| April 27 |
Thrust D: OPEN TO THRUST D ONLY: "Planning Session: Research Update and New
Mentor Briefing"
Hilton Pryce Lewis, Massachusetts Institute of
Technology, and Gina Weibel, Cornell University (PDF) |
| May 4 |
Thrust A: "CMP Waste Treatment: Electrophoretic Cross-Flow
Filtration"
Jamie Ludke, University of Arizona (PDF) |
| May 11 |
Thrust B: "An Advanced Cleaning Technique That is
Environmentally Benign"
Karen Reinhardt, Member of Technical Staff,
GaSonics International (PDF) |
| May 18 |
Thrust C: "The Environmental Value Systems
(EnV-S) Analysis: Applied to Copper CMP Wastewater Treatment Options"
Nikhil Krishnan and Sara Thurwachter, University
of California-Berkeley (PDF) |
| May 25 |
Thrust D: "Theoretical Approach to Understanding Gas Phase
Reactions in Hot Filament Chemical Vapor Deposition of Low k Fluorocarbon Films"
Kenneth Lau, Massachusetts Institute of Technology (PDF) |
| June 1 |
Thrust A: "Callenges in Patterning High K
Dielectrics"
Marci Yi-Ting Liao, Stanford University (PDF) |
| June 8 |
Thrust B: "Removal of Metallic
Contamination from Silicon Surfaces Using Dry Cleaning Methods"
Robert Opila, Lucent Technologies, Bell Laboratories (PDF) |
| June 15 |
Thrust C: "Data Acquisition and Analysis for Cu CMP"
David Cox, PE, Environmental Software Providers (ESP) (PDF)
|
| June 22 |
Thrust D: "Advanced Silver Metallization"
Terry Alford, Arizona State University (PDF1)
(PDF2) |
| June 29 |
Thrust A: Cancelled to accommodate
planning for upcoming Policy Board Meeting |
| July 6 |
Thrust B: Closed planning
session for upcoming Retreat.
Open to Thrust B PIs, Students and Researchers/PostDocs only. |
| July 13 |
Thrust C: "Detection,
Characterization and Control of Bacteria in UPW Systems "
Kim Ogden and Dawn Baker, University of Arizona (PDF) |
| July 20 |
Thrust D: Closed planning
session for upcoming Retreat.
Open to Thrust D PIs, students and researchers only. |
| July 27 |
Thrust A: "Hot-Filament CVD of Organosilicon Low-Dielectric
Constant Films"
Tom Casserly, Massachusetts Institute of
Technology (PDF) |
| Aug. 3 |
Thrust B: "Alternative Gate
Dielectric Materials for Future Scaling of MOS Devices"
Dr. Glen Wilk, Bell Laboratories-Lucent Technologies (PDF) |
| Aug. 10 |
Cancelled--ERC Annual Retreat at Stanford |
| Aug. 17 |
Cancelled to restructure
TeleSeminar series |
| Aug. 24 |
Cancelled to restructure
TeleSeminar series |
| Aug. 31 |
Cancelled to restructure
TeleSeminar series |
| Sept. 7 |
Cancelled to restructure
TeleSeminar series |
| Sept. 14 |
Host: Karen Gleason,
MIT
Guest: Dr. Jeffrey Calvert, Shipley Co., LLC
Topic: Materials for Next Generation Lithography and Advanced
Back-End-of-Line Interconnects--An Overview
Guest: Dr. Gary Taylor, Shipley Co., LLC
Topic: Resists for High Throughput Next Generation
Lithographies
Calvert-(PDF)
Taylor-(PDF) |
| Sept. 21 |
Cancelled for TECHON2000 |
| Sept. 28 |
Cancelled |
| Oct. 5 |
Host: Anthony Muscat,
University of Arizona
Presentation by: Casey Finstad, UA
Topic: UV-Initiated Surface Preparation and Reaction on
Semiconductor Wafer Surfaces (PDF)
Presentation by: Niraj Rana, UA
Topic: Effect of Organic Contaminants on the Quality of
Ultra-Thin Silicon Oxide (PDF) |
| Oct. 12 |
Host: Chris Chidsey,
Stanford University
Topic: Thoughts
on Controlling Interfacial Electron Transfer in Novel FET Structures (PDF) |
| Oct. 19 |
Host: Paul McIntyre,
Stanford University
Guest Presentation: Eric Garfunkel, Professor of Chemistry, Rutgers
University
Topic: Ion Scattering Studies of Gate Dielectrics (PDF) |
| Oct. 26 |
Host: Anthony Muscat,
University of Arizona
Presentation Guest: Harald Okorn-Schmidt, IBM
Topic: EDP-OCP Measurement Technique (PDF) |
| Nov. 2 |
Host: Chris Chidsey,
Stanford University
Presentation by: Chris Chidsey and Sangwoo Lim, Stanford
Topic: Aqueous Ozone for Photoresist Stripping (PDF) |
| Nov. 9 |
Host: Karen Gleason, MIT
Presentation Guest: Dick Bersin, ULVAC Technologies Inc.
Topic: Manufacturing
Qualification of an All Dry De-veil Plasma Process (PDF#1)
(PDF#2) |
| Nov. 16 |
Host: Duane Boning, MIT
Presentation Guest: Sangjun Han, Mechanical Engineering, MIT
Topic: Extrusion Spin Coating for Efficient Photoresist Application
(PDF#1)
(PDF#2) |
| Nov. 23 |
NO TeleSeminar--HAPPY THANKSGIVING! |
| Nov. 30 |
No TeleSeminar |
| Dec. 7 |
Host: Rafael Reif, MIT
Presentation by: Ritwik Chatterjee, MIT
Topic: "The Use of C4F6 for Dielectric Etch with Reduced
Global Warming Emissions" (PDF) |
| Dec. 14 |
Host: Farhang Shadman,
University of Arizona
Presentation by: Ara Philipossian, University of Arizona
Topic: CMP Fluid Dynamics Analysis (PDF) |
| Dec. 21, 28 |
NO TeleSeminar--MERRY CHRISTMAS! |
